TY - JOUR T1 - Three-dimensional nanosprings for electromechanical sensors JF - Sensors and Actuators, A: Physical VL - 130-131 IS - SPEC. ISS. SP - 54 EP - 61 PY - 2006/// AU - Bell, D.J. AU - Sun, Y. AU - Zhang, L. AU - Dong, L.X. AU - Nelson, B.J. AU - Grützmacher, D. N1 - Cited By (since 1996): 17 N1 - Export Date: 7 October 2010 N1 - Source: Scopus UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-33745829379&partnerID=40&md5=420ff894615b944910ad77268fc14986 ER -