TY - JOUR M1 - Copyright 2008, The Institution of Engineering and Technology TI - Precision patterning of PDMS membranes and applications AD - Dept. of Mech. Ind. Eng., Toronto Univ., Toronto, ON, Canada JO - Journal of Micromechanics and Microengineering T3 - J. Micromech. Microeng. (UK) A1 - Jianhua Tong A1 - Simmons, C.A. A1 - Yu Sun VL - 18 IS - 3 PY - 2008/03/ U1 - 9972021 SP - 037004 (5 pp.) SN - 0960-1317 CY - UK PB - IOP Publishing Ltd. N2 - This paper presents a method for precision patterning of polydimethylsiloxane (PDMS) membranes based on parylene C lift-off. The process permits the construction of PDMS membranes either with a highly flat, uniform top surface or with a controlled curvature. Effects of varying processing parameters on the geometrical characteristics of the PDMS membranes are described. The paper also demonstrates the application of the PDMS precision patterning method to the construction of PDMS microlens arrays, which require curved top surfaces, and a 3-axis electrostatic positioning stage that uses PDMS membranes with flat surfaces as a bonding material as well as a precisely defined spacer. KW - bonding processes KW - membranes KW - microlenses KW - micro-optomechanical devices KW - optical arrays KW - optical fabrication KW - optical polymers KW - precision engineering U2 - precision patterning U2 - PDMS membranes U2 - polydimethylsiloxane membranes U2 - microlens arrays U2 - curved top surfaces U2 - 3-axis electrostatic positioning U2 - bonding material U2 - precisely defined spacer U2 - parylene C lift-off L2 - http://dx.doi.org/10.1088/0960-1317/18/3/037004 ER -